France – Machines et appareils microélectroniques – Fourniture d'un banc humide automatisé à solvant pour le décapage BEOL pour le CEA Grenoble
AI summary
This tender concerns the procurement of an automated wet bench with solvent for BEOL (back-end-of-line) stripping processes at CEA Grenoble. The equipment is for microelectronic manufacturing and will be used in semiconductor processing operations.
Equipment manufacturers or authorized distributors specializing in microelectronic processing systems and wet chemistry tools should bid. Experience in semiconductor manufacturing equipment is essential.
Suppliers must provide technical specifications and documentation for an automated solvent-based wet processing system compliant with BEOL decapping requirements. Experience in microelectronics equipment supply and technical support capacity are expected.
Frequently asked questions
What is this tender about?
This tender concerns the procurement of an automated wet bench with solvent for BEOL (back-end-of-line) stripping processes at CEA Grenoble. The equipment is for microelectronic manufacturing and will be used in semiconductor processing operations.
What are the requirements for suppliers?
Suppliers must provide technical specifications and documentation for an automated solvent-based wet processing system compliant with BEOL decapping requirements. Experience in microelectronics equipment supply and technical support capacity are expected.
What type of company should bid?
Equipment manufacturers or authorized distributors specializing in microelectronic processing systems and wet chemistry tools should bid. Experience in semiconductor manufacturing equipment is essential.
Who is the buyer?
The buyer is CEA Grenoble.
When does this tender close?
Submissions close on August 10, 2026.
Le CEA de Grenoble souhaite se fournir d'un banc humide à solvant pour le décapage BEOL
Fourniture d'un banc humide automatisé à solvant pour le décapage BEOL pour le CEA Grenoble
Le CEA LETI souhaite faire l’acquisition d'un banc humide automatisé à solvant pour le décapage BEOL. Le marché comporte également : - Des options à chiffrage obligatoire : o Option 1 : Un capteur de particules pour bacs solvants ; o Option 2 : Un bac dédié à l’Acide Fluorhydrique (HF) ; o Option 3 : Un réservoir de refroidissement. - Des options à chiffrage facultatifs : o Option 4 : Des échangeurs de chaleur et de refroidissement ; o Option 5 : Formation Maintenance de Niveau 1 ; o Option 6 : Formation Maintenance avancée ; o Option 7 : Une extension de garantie d’un (1) an ; o Option 8 : Le prix du transport, assurance comprise, selon les conditions DAP CEA Grenoble (Convention Incoterms ICC 2020).
- PriceLe prix n'est pas le seul critère d'attribution et tous les critères sont énoncés uniquement dans les documents du marché.
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