France – Machines et appareils microélectroniques – Acquisition d’une paillasse de gravure matériaux III-V pour le CEA de GRENOBLE

DeadlineSeptember 14, 2026 at 10:00 AM61 days left

AI summary

This tender concerns the acquisition of a semi-automatic chemistry workbench for etching and cleaning III-V materials (InP, GaAs) on silicon wafers of 100–300 mm diameter for microelectronics research at CEA-LETI Grenoble. The equipment must fit specific dimensions (2500×1700×2100 mm) to replace an existing unit in the cleanroom. Optional items include temperature exchangers, power transformers, maintenance training, extended warranty, and transport with insurance.

#microelectronics#etching equipment#iii-v materials#grenoble#cea#semiconductor research#cleanroom technology
Fit for

Established manufacturers or integrators specializing in microelectronics etching equipment and III-V material processing systems. The supplier must demonstrate experience with precision chemical workstations for semiconductor research and cleanroom environments.

Key requirements

Suppliers must provide equipment meeting strict dimensional and functional specifications for III-V material processing on multiple wafer sizes. Technical documentation, training options, and delivery to CEA Grenoble under Incoterms DAP are required. Compliance with cleanroom standards and compatibility with existing infrastructure is essential.

Frequently asked questions

  • What is this tender about?

    This tender concerns the acquisition of a semi-automatic chemistry workbench for etching and cleaning III-V materials (InP, GaAs) on silicon wafers of 100–300 mm diameter for microelectronics research at CEA-LETI Grenoble. The equipment must fit specific dimensions (2500×1700×2100 mm) to replace an existing unit in the cleanroom. Optional items include temperature exchangers, power transformers, maintenance training, extended warranty, and transport with insurance.

  • What are the requirements for suppliers?

    Suppliers must provide equipment meeting strict dimensional and functional specifications for III-V material processing on multiple wafer sizes. Technical documentation, training options, and delivery to CEA Grenoble under Incoterms DAP are required. Compliance with cleanroom standards and compatibility with existing infrastructure is essential.

  • What type of company should bid?

    Established manufacturers or integrators specializing in microelectronics etching equipment and III-V material processing systems. The supplier must demonstrate experience with precision chemical workstations for semiconductor research and cleanroom environments.

  • Who is the buyer?

    The buyer is CEA Grenoble.

  • When does this tender close?

    Submissions close on September 14, 2026.

Pour ses activités de recherche, le CEA-LETI souhaite acquérir un équipement, une paillasse de chimie semiautomatique pour la gravure et le nettoyage de matériaux III-V sur des plaques de silicium, de phosphure d’indium (InP) ou d’arséniure de gallium (GaAs) de diamètres 100, 150, 200 et 300 mm pour la microélectronique. Cette paillasse remplace une paillasse déjà existante dans la salle blanche du LETI. Par conséquent, l’équipement proposé doit respecter les dimensions suivantes : o Longueur = 2500 mm o Profondeur = 1700 mm o Hauteur = 2100 mm Le marché comprend également les options à chiffrage facultatif suivantes* : o Option 1 : Echangeurs de températures et refroidisseurs (§3.2.6) ; o Option 2 : Transformateurs d’alimentation (§4.1.4) ; o Option 3 : Formation maintenance 1er niveau (§9) ; o Option 4 : Formation maintenance avancée (§9) ; o Option 5 : Extension de garantie d’un an supplémentaire (§11.1) ; o Option 6 : La mise à disposition d’un contact sec indiquant l’ouverture de la vanne du drain de vidange H2SO4 ou H2SO5 (§4.2.3) ; o Le prix du transport, assurance comprise, selon les conditions DAP CEA Grenoble (Convention Incoterms ICC 2020).

Buyer
CEA Grenoble
Buyer ID: 77568501900298·Mme JOLLY Nadège
17 rue des Martyrs, 38054, Grenoble
Body responsible for review procedures
GREFFE TRIBUNAL ADMINISTRATIF DE GRENOBLE
Buyer ID: 173800053
2 Place de Verdun, Boîte Postale 1135, 38022, Grenoble Cedex
Other organization
Publications Office of the European Union
Buyer ID: PUBL
2417, Luxembourg

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